SCA Powder CVD for Mass Production
Product Overview
SCA is designed for deposit silicon deposition and carbon coating in high uniformity and encapsulation completeness with excellent batch-to-batch stability and repeatability.
Technical Advantages
Capacity: 10-50kg Porous Carbon (customizable)
Sample Temperature: RT-800℃
Max Precursor: Max 4 Gas and 2 Liquid/Solid Precursors
Max Precursor Heating: RT-200℃
Deposition Time: 5-8 hrs
Coating Time: 2-5 hrs
Products category
For Industry
Application
FAQ
How does SCA perform in terms of temperature uniformity?
The multi-zone temperature control design optimizes thermal uniformity, with zone temperature accuracy within ±1°C.
How does SCA perform in terms of uniformity of silicon-carbon anode production?
Optimized distributor plate design effectively reduces bubble size, enhances gas-solid reaction efficiency, and ensures uniform silicon-carbon deposition.
How does SCA perform in terms of operation safety?
The equipment design complies with semiconductor-grade standards and explosion-proof specifications. With a high level of automation, it ensures maximum operational safety.
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