Advanced Optics

Yunmao's independently developed batch ALD and PEALD systems are designed for cutting-edge applications including Mini/Micro LED, advanced optics, and AR/VR.

Semiconductor

SiC epitaxial CVD, diamond MPCVD, and PECVD serve the third-generation, fourth-generation , and silicon-based integrated circuit semiconductor markets.

Alternative Energy

Powder ALD and CVD systems achieve mass production, with innovative processes applied in alternative energy sectors like lithium batteries.

Frontier Devices

Yunmao UHV equipment platform includes PVD systems and ALD systems widely used in superconducting electronic devices, optical micro/nano-devices, spintronic chips, 3D chip packaging, ferroelectric material-based chips, memory chips and energy storage devices.