QBT-MPC
Multi-target Ultra-high Vacuum Magnetron Co-Sputtering System
QBT-MPC includes two ultra-high vacuum chambers Load lock and Sputtering, equipped with a fully automatic operation. The system is equipped with multiple magnetron cathodes with in-situ tilting for co-sputtering process. QBT-MPC is the state-of-the-art sputtering system of material platform, such as spintronics, topological materials, superconducting materials, etc.
