FAQ
FREQUENTLY ASKED QUESTIONS
Product FAQ
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What are the applications of MINI?
Semiconductor field: High-K dielectrics, supercapacitors, diodes, etc.; Nanocatalyst field: Photocatalysis, electrochemical catalysis; Perovskite solar cells.
How does SCA perform in terms of temperature uniformity?
The multi-zone temperature control design optimizes thermal uniformity, with zone temperature accuracy within ±1°C.
How does SCA perform in terms of uniformity of silicon-carbon anode production?
Optimized distributor plate design effectively reduces bubble size, enhances gas-solid reaction efficiency, and ensures uniform silicon-carbon deposition.
What is the process temperature range of SCA?
The equipment is constructed with high-temperature-resistant alloy steel (310S grade or higher), supporting a maximum process temperature of 1000°C to accommodate most process temperature windows.
How does SCA perform in terms of operation safety?
The equipment design complies with semiconductor-grade standards and explosion-proof specifications. With a high level of automation, it ensures maximum operational safety.
